发明名称 MGO DEPOSITION MATERIAL
摘要 PROBLEM TO BE SOLVED: To provide an MgO deposition material which is manufactured with excellent yield, can provide excellent discharge responsiveness over a wide temperature range, and enables the number of address IC to be considerably reduced without degrading panel luminance. SOLUTION: An MgO deposition material for forming a protection film for a PDP is composed of an MgO pellet having an MgO purity of≥98% and a relative density of≥90%. The pellet includes only Sc element as a rare earth element. Concentration of the Sc element is 5-5,000ppm, preferably, 10-3,000ppm, and more preferably, 20-2,000ppm. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006207013(A) 申请公布日期 2006.08.10
申请号 JP20050117718 申请日期 2005.04.15
申请人 MITSUBISHI MATERIALS CORP 发明人 SAKURAI HIDEAKI;MAYUZUMI YOSHIYUKI;HIRATA HIROKI
分类号 C23C14/24;C23C14/08;H01J9/02;H01J11/02;H01J11/22;H01J11/34;H01J11/40 主分类号 C23C14/24
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