| 摘要 |
A method of using copper alloy substrate for growing carbon nanotubes, wherein copper is used as the base for copper matrix, and catalysts (ferrum, cobalt, and nickel) are dissolved in the copper matrix to form an alloy substrate. During the course of production for the carbon nanotube, the alloy substrate is positioned on the sample holder of the chamber, and the mechanical pump is used to extract the air pressure of the chamber under 10-3 torrs, and then the reaction gas is introduced into the chamber, and the total pressure is maintained at about 3 torrs. The reaction temperature of the alloy substrate at 850~950° C. is provided by a heat-resistant tungsten fuse, and then preliminary dissociation of the reaction gas before introduced into the chamber is provided by a microwave generator. Furthermore, a radio frequency generator functions at a rate of 100~600 W to completely dissociate the reaction gas and produces a self bias at -150V~-450V to direct the straight growth and maintain the steady growth for 20 minutes for the carbon nanotube.
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