发明名称 SAMPLE PREPARATION FOR MICRO-ANALYSIS
摘要 System and method for preparing a sample for micro-analysis, comprising: (a) sample precursor holding unit, for supporting and holding a sample precursor; (b) transporting and positioning unit, for transporting and positioning the sample precursor holding unit; (c) optical imaging unit, for optically imaging, recognizing, and identifying, target features on the sample precursor, and for monitoring the sample preparation; (d) picking and placing unit, for picking and placing the sample precursor and system components from initial positions to other functionally dependent positions; (e) micro groove generating unit, for generating at least one micro-groove in a surface of the sample precursor, wherein the micro-groove generating unit includes components for controlling formation of each micro-groove in the surface; and (f) cryogenic sectioning unit, for cryogenically sectioning the sample precursor to a pre-determined configuration and size, for forming the prepared sample. Optionally, includes a micro-mask adhering unit, and a macro-mask adhering method.
申请公布号 WO2006082585(A2) 申请公布日期 2006.08.10
申请号 WO2006IL00141 申请日期 2006.02.05
申请人 SELA SEMICONDUCTOR ENGINEERING LABORATORIES LTD.;BOGUSLAVSKY, DIMITRI;SMITH, COLIN;VIAZOVSKY, DAN;FARHANA, DANNY;ZACHARIN, DIMITRY;ARONOV, GRIGORI 发明人 BOGUSLAVSKY, DIMITRI;SMITH, COLIN;VIAZOVSKY, DAN;FARHANA, DANNY;ZACHARIN, DIMITRY;ARONOV, GRIGORI
分类号 G01N1/28;B28D5/00;G01N1/32;G01N23/04;H01L21/00 主分类号 G01N1/28
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