摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a variable capacitor capable of obtaining a big capacity and a big change in capacity and also finely adjusting the capacity even if it is of a small configuration. <P>SOLUTION: A movable electrode 1 on a lower side is convexly deformed although a movable electrode 2 on an upper side is flat. A dielectric layer 3 is provided on the opposed surface of the movable electrode 1 (a). A desired capacitance is obtained by adjusting voltage applied between the movable electrode 1 and movable electrode 2 to secure an arbitrary distance between both the electrodes 1, 2 by electrostatic attraction generated between both the electrodes 1, 2. A part of the movable electrode 1 and that of the electrode 2 are first contacted through the dielectric layer 3 in the central section because the movable electrode 1 is convex if the distance between both the electrodes 1, 2 is gradually reduced (b). Thereafter, the movable electrode 2 and the dielectric layer 3 (movable electrode 1) are being contacted sequentially from the contacting section to the circumferential section and a contacting region is gradually spreading (c). <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |