| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor and its manufacturing method which facilitate the fixing work and adjustment of a tuning fork type quartz element, eliminating futility and promoting small-sizing. <P>SOLUTION: The angular velocity sensor is provided with the tuning fork type quartz element provided with a drive electrode exciting the tuning fork oscillation and a sensor electrode detecting electric charge caused in accordance with the angular velocity, an independent stage on which one main surface of the tuning fork base in the tuning fork type quartz element is fixed in one body in advance, a vessel body for mounting on the surface which has a recess part where the stage made in one body to the tuning fork type quartz element by sealing the tuning fork type quartz element is fixed to the inner bottom surface, and IC arranged inside or outside the vessel, which has an oscillation circuit driving the tuning fork type quartz element and a signal processing circuit producing signal corresponding to the angular velocity according to the electric charge. The stage has a weight and geometry for moving the center of gravity of the tuning fork type quartz element to the tuning fork base side and maintaining the horizontal direction of the tuning fork type quartz element. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
