| 摘要 |
PROBLEM TO BE SOLVED: To transfer a substrate by respectively and independently operating two chucks by linking with operation of a single arm. SOLUTION: This substrate transfer device can transfer the substrate up to a substrate delivery position by imparting predetermined rectilinearly advancing operation to the chucks; and has a hand driving plate 10 rotatingly driven by a belt 7, a first wrist block 13 and a second wrist block 15 arranged in a vertical position of the hand driving plate, rotatable by following rotational operation of the hand driving plate and connecting the chucks 21A and 22A to the tip, a first stopper pin 35 and a second stopper pin 36 for regulating the revolving direction to an arm 3 of the respective wrist blocks. The hand driving plate, the first wrist block and the second wrist block are joined by magnetic force, and when the hand driving plate revolves, the wrist blocks also simultaneously revolve with the hand driving plate by magnetic force joining in the direction unregulated by the stopper pins. COPYRIGHT: (C)2006,JPO&NCIPI
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