| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a technology capable of measuring accurately thrust ripples and correcting them. <P>SOLUTION: A moving body control device includes a moving body provided movably in at least one directions, movable elements connected to the moving body, a drive unit having fixed elements that displace the movable elements, a control unit that energizes the drive unit and generates thrust on the movable elements, a position detector that detects relative position between movable elements and the fixed elements at the drive unit, a measuring portion that measures induced voltages generated at the drive unit by driving the movable elements of the drive unit, and a correction computer that computes thrust ripple correction values for correcting thrust ripples, that is, the fluctuations of thrusts generated at the drive unit to be multiplied by commands to the drive portion using the correction values. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
