摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron emitting element high in irradiation accuracy and capable of reducing its size while reducing a quality problem such as luminance unevenness, and also provide its manufacturing method, an electro-optical device, and electronic equipment. <P>SOLUTION: The element comprises a wiring 18 that is a first wiring formed on a substrate 11; a wiring 17 that is a second wiring formed so as to cross to the wiring 18; a central electrode 14 that is a first electrode formed so as to connect to the wiring 18; and an outer circumference electrode 16 that is a second electrode formed in a ring shape around a central electrode 14, then, forms an electron emitting part 13 having a ring-like nano gap between the central electrode 14 and the outer circumference electrode 16. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |