| 摘要 |
PROBLEM TO BE SOLVED: To form a through-hole so that residues during perforation may not remain in a green sheet. SOLUTION: The working method of the green sheet comprises the step of preparing the green sheet 1, the step of arranging the green sheet 1 on the stand 12 that incorporates a liquid, and the step of irradiating the laser beam 13 from the green sheet 1 side, forming a through-hole as needed, and evaporating the liquid contained in the stand 12 to clean and remove the residues 15 of the inner wall surface of the through-hole 5. COPYRIGHT: (C)2006,JPO&NCIPI |
