| 摘要 |
PROBLEM TO BE SOLVED: To provide a ceramic electrostatic chuck which is excellent in cooling performance and soaking performance by restraining in-plane dispersion of chucking force. SOLUTION: A groove 3 is formed of a prescribed uniform pattern in a supporter 1 side of a ceramics plate 10 which becomes both a dielectric layer 2 and the supporter 1. A conductive film 4 which becomes an attraction force generating electrode is formed in the bottom of the groove 3. A conductive coat can be readily formed by using electroless plating, a conductive paste (metallization) or the like. It is preferable that the pattern of the groove 3 is uniform from the aspect of soaking. The groove 3 is filled with an insulating material 5 for realizing electrical insulation with a cooling unit or the like. COPYRIGHT: (C)2006,JPO&NCIPI |
