| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate processor, capable of performing processes in a safe state, by preventing recipe for operation from being prepared in the procedure for recovering a substrate to a cassette in a state with incomplete cooling. SOLUTION: The substrate processor for processing the substrate, being provided with a plurality of process chambers and executing the plurality of processes by using the plurality of process chambers, comprises a carrying order specifying means for specifying a carrying order to the process chambers for each substrate; a substrate carrying means for successively carrying each substrate to the process chamber; a process specifying means for specifying the process to be executed in the process chamber for each substrate, an execution means for executing the process specified by the process specifying means in the process chamber, and a determining means for determining whether or not cooling processing is specified as a process to be executed last among the processes. COPYRIGHT: (C)2006,JPO&NCIPI
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