发明名称 |
Alignment apparatus, exposure apparatus, and device manufacturing method |
摘要 |
An alignment apparatus which moves a object comprises a first structure having a holding member which holds the object, a second structure having a magnet which constitutes a linear motor, the linear motor drives the first and second structure, and a flow passage formed between the holding member and the magnet.
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申请公布号 |
US2006175993(A1) |
申请公布日期 |
2006.08.10 |
申请号 |
US20060342040 |
申请日期 |
2006.01.27 |
申请人 |
SHIBATA YUGO;KIMURA ATSUSHI |
发明人 |
SHIBATA YUGO;KIMURA ATSUSHI |
分类号 |
H02P7/00 |
主分类号 |
H02P7/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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