| 摘要 |
PROBLEM TO BE SOLVED: To prevent cleavage of a diaphragm formed of single crystal silicon. SOLUTION: This micro-valve includes: an electrostatic actuator 1; the diaphragm 2 made of single crystal silicon and driven by the electrostatic actuator 1; and a passage 3a opened and closed by reciprocation of the diaphragm 2, wherein the outer edge area 2a of the diaphragm 2 is reformed to the crystal structure other than single crystal. COPYRIGHT: (C)2006,JPO&NCIPI
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