<p>A fluid storage and dispensing system comprising a vessel for holding a pentaborane(9)-containing fluid at subatmospheric pressure. The fluid storage and dispensing system may be communicatively connected to a semiconductor or liquid crystal display manufacturing facility, whereby the pentaborane(9) is used as a substitute for commercially available boron hydride compounds such as diborane.</p>
申请公布号
WO2006083363(A2)
申请公布日期
2006.08.10
申请号
WO2005US42490
申请日期
2005.11.23
申请人
ADVANCED TECHNOLOGY MATERIALS, INC.;OLANDER, KARL, W.;ARNO, JOSE, I.