MICRO HEAT ENGINE AND METHOD OF MANUFACTURING

摘要

The present invention relates generally to micro heat engines (MHEs) and methods of manufacture. More particularly, the present invention relates to an MHE including a substrate having a sealed microchannel for operatively containing a liquid droplet within the microchannel and a thermal bridge for providing a heat source or heat sink to the microchannel. The MHE also includes a piezoelectric sensor responsive to a pressure change within the microchannel to induce voltage across the piezoelectric sensor and a power output.