| 摘要 |
<P>PROBLEM TO BE SOLVED: To enable θ rotation of a stage with a gas control actuator. <P>SOLUTION: A gas control rotary moving device 10 comprises a body 12, a table 30 to the pivotable body 12, two or more gas control actuators 100 provided in the body 12, a sensor 40 and a measuring part 42 for detecting the rotary movement of the table 30, and a control unit 50 for controlling the whole operation by these elements. The gas control actuators 100 are formed corresponding to each side of a rectangle shaft 32 of the table 30, respectively. It has a movable body which is guided by a guiding part and driven with gas pressure so that the driving force may be applied to the rectangle shaft 32 via the gas supplied between the head side of the moving body and the gas receiving abutment side, by letting the side corresponding to the rectangle shaft 32 as the gas receiving abutment side. The table 30 rotates in collaboration with the driving force applied by the two or more gas control actuators 100 to the rectangle shaft 32. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
