| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a treatment apparatus and method for a thread-like object, capable of easily installing an object to be treated and performing desired plasma treatment. <P>SOLUTION: This treatment apparatus for a thread-like object includes a dielectric cylinder 2 provided with an insertion inlet port which permits insertion of the object to be treated, and electrodes 3, 4 around the dielectric cylinder 2, and in which a gas supply device is jointed with the dielectric cylinder 2, and a power supply device is jointed with the electrodes 3, 4, an inscribing circle having the minimum diameter among inscribing circles which are brought into contact with a sectional surface vertical in the insertion direction of the object to be treated inside the dielectric cylinder 2 is not positioned at an area inside the dielectric cylinder 2 and an area formed between the electrode 3 and the electrode 4, therefore the object to be treated is not brought into contact with the wall surface in the dielectric cylinder 2 at the time of irradiating the plasma, thus performing the desired plasma treatment. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
