| 摘要 |
PROBLEM TO BE SOLVED: To improve castability and workability by simplifying structure of a whole, and to miniaturize a facility in a manifold device provided with a manifold body formed with a gas passage and a plurality of nozzles jetting out gas of the gas passage, and opening and closing valves capable of opening and closing the gas passage. SOLUTION: Valve seat parts 14a-14d of the opening and closing valves 4a-4d are formed on one face 10a of the manifold body 10, and the opening and closing valves 4a-4d are attached to a case body 11 provided as a separate member from the manifold body 10 which can be joined to the manifold body 10. COPYRIGHT: (C)2006,JPO&NCIPI
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