| 摘要 |
PROBLEM TO BE SOLVED: To provide a hard film coated sliding member having improved wear resistance and lubricating property and reduced compressive stress residing in a hard film to permit the thickening of the hard film and reduce the wear, seizure and other attacking property of the member under severe sliding environment. SOLUTION: In the hard film coated sliding member having a hard film coated thereon, at least one layer of the hard film is shown by (Cr<SB>(100-α)</SB>Si<SB>α</SB>)(N<SB>(100-γ-η)</SB>B<SB>γ</SB>G<SB>η</SB>), whereα,γ,ηare atom%, 0<α≤4.76, 0≤γ<45, and 0≤η≤55 are satisfied when the atom% of only a metal component is 100 and the atom% of a non-metal component is 100, G has at least one type selected from C, O, and S, and the hard film has a concentration modulated Si content. COPYRIGHT: (C)2006,JPO&NCIPI
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