Light exposure mask device, has adjustment frame with vacuum channel for aligning and fixing work piece carrier and frame together, and another vacuum channel for aligning and fixing mask and frame together

摘要

The device has a light exposure mask (7), and an adjustment frame (5) with a vacuum channel (10) for aligning and fixing a work piece carrier (2) and the frame together. The frame has a vacuum channel (9) for aligning and fixing the mask and the frame together. The frame exhibits two adjustment pins (13) corresponding to adjustment holes (15) of the carrier. The carrier is adjustable towards the device to push the pins into the holes. An independent claim is also included for a method for alignment of a set of substrates.