| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic capacity type acceleration sensor where a diaphragm has sufficient displacement amounts in three axis directions, the camber is suppressed by high rigidity, and the accelerations in three axis directions can be detected in a balanced manner. SOLUTION: The diaphragm 10 comprises a fixed section 110 constituting the outer periphery, and a movable section 120 disposed inside the fixed section 110. The movable section 120 comprises a gimbal section 121 disposed inside the fixed section 110, a fan-like X-directional detection movable section 122x and Y-directional detection movable section 122y that are disposed via a beam section 140 disposed at a position corresponding to the boundary between an X-directional detection electrode 33x and Y-directional detection electrode 33y of an electrode substrate 30 and face these detection electrodes 33x and 33y, respectively, and a Z-directional detection movable section 122z that is disposed inside the detection movable sections 122x and 122y and face a Z-directional detection electrode 33z of the electrode substrate 30. COPYRIGHT: (C)2006,JPO&NCIPI
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