| 摘要 |
PROBLEM TO BE SOLVED: To provide a tactile sensor which can properly measure minute deformation occurring at a contact part with an object, and to provide its manufacturing method. SOLUTION: The tactile sensor 10 comprises a structure having a sensitive part supported by a hinge part, a detection part for detecting the attitude of the sensitive part, and an elastomer 14 for covering at least the sensitive part of the structure. The tactile sensor 10 can be manufactured through a process of forming a piezoresistive film on the surface of the hinge part and the sensitive part, a process of forming a material film, which is a conductor and magnetic material, on the sensitive part, a process of applying a magnetic field to the structure, and a process of covering at least the sensitive part of the structure with the elastomer. COPYRIGHT: (C)2006,JPO&NCIPI
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