| 摘要 |
PROBLEM TO BE SOLVED: To provide a soft magnetic film capable of accelerating a reduction in film stress by adjusting a ratio of concentration of an impurity included in the film of a CoFeNi alloy, and to provide a magnetic head using it. SOLUTION: Adjusting the ratio of concentration of a minute amount of an element Cl and an element S included in the CoFeNi alloy within the range from 1 to 60 can effectively make the film stress of the soft magnetic film small. It can specifically make the film stress small not more than 1,200 MPa. It can also make a variation in film stress small to improve a yield of the CoFeNi alloy having the small film stress. COPYRIGHT: (C)2006,JPO&NCIPI
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