| 摘要 |
PROBLEM TO BE SOLVED: To provide a low cost displacement sensor in which spatial and time precision can be improved, and to provide an oxide semiconductor for it and its manufacturing method. SOLUTION: A plurality of first leads 2, and a plurality of second leads 3 which intersect each first lead 2, are provided. A diode 4 connected to the above both is provided on the intersection of the first lead 2 and the second lead 3. A first switch SW1 for sequentially switching and applying a voltage for detection to the first lead 2, and second switches SW11-14 for sequentially switching the conduction/non-conduction of each second lead 3, are provided. A detection unit 6 and an operation unit 7 are provided for detecting and calculating the mutual displacement of each intersection by detecting the above voltage for detection from each second lead 3. The diode 4 is an oxide semiconductor of two layer structure film having a first layer mainly containing a zinc oxide formed by the low temperature oxidation of the copper-zinc alloy, and a second layer which is mainly a copper oxide. COPYRIGHT: (C)2006,JPO&NCIPI
|
