| 摘要 |
PROBLEM TO BE SOLVED: To supply hydraulic pressure to the moving body side from the base side, without reducing smooth operation and positioning accuracy of a moving body. SOLUTION: This fluid supply mechanism 1 supplies fluid to the moving body 4 linearly movably supported by a base 3 from the base 3; and has a hollow rod 6 fixed to any one of the base 3 or the moving body 4 and arranged in the moving direction of the moving body 4 and a fluid chamber 7 fixed to any other of the base 3 or the moving body 4. The fluid supply mechanism 1 is provided so that a rod inserting hole 10a for penetrating the hollow rod 6 with clearance in he radial direction, is arranged on a pair of opposed wall surfaces 10 of the fluid chamber 7, and a through-hole 8 for connecting the inside of the hollow rod 6 and the inside of its peripheral fluid chamber 7, is arranged in the hollow rod 6, and a fluid supply pipe 9 is connected to any of an inside space 6b of the hollow rod 6 or the fluid chamber 7 fixed to the base 3. COPYRIGHT: (C)2006,JPO&NCIPI
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