TOOL, mu MANIPULATOR AND METHOD OF MANUFACTURING TOOL

摘要

PROBLEM TO BE SOLVED: To provide a tool for easily and efficiently sampling a sample, and its manufacturing method. SOLUTION: This tool has a tapering-off core for sampling the sample. A plurality of projections 12 thinner than the core 11 are formed in a tip part on the thin core 11 side. A thin side tip part of the core 11 is formed in a semi-spherical shape, and a radius of curvature of a semi-sphere is set to 0.5μm to 5μm. A diameter of the projections 12 is set to 0.5 nm to 20 nm. The height of the projections 12 is set to 50 nm to 100μm. An interval distance of the projections 12 is set to 1 nm to 1μm. COPYRIGHT: (C)2006,JPO&NCIPI