发明名称 Laser apparatus and manufacturing method of thin film transistor using the same
摘要 A laser apparatus comprises a laser generating unit, and an intensity pattern regulating unit including a pair of blocking parts and a pair of semi-through parts, wherein the pair of semi-through parts are placed between the pair of blocking parts and adjust an intensity of an incident laser beam.
申请公布号 US2006176920(A1) 申请公布日期 2006.08.10
申请号 US20060334028 申请日期 2006.01.18
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 PARK CHEOL-HO
分类号 H01S3/00 主分类号 H01S3/00
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