发明名称 VERFAHREN ZUM HERSTELLEN EINER NADELKARTE
摘要 A method of designing and manufacturing a probe card assembly includes prefabricating one or more elements of the probe card assembly to one or more predefined designs. Thereafter, design data regarding a newly designed semiconductor device is received along with data describing the tester and testing algorithms to be used to test the semiconductor device. Using the received data, one or more of the prefabricated elements is selected. Again using the received data, one or more of the selected prefabricated elements is customized. The probe card assembly is then built using the selected and customized elements.
申请公布号 DE60207572(T2) 申请公布日期 2006.08.10
申请号 DE2002607572T 申请日期 2002.07.10
申请人 FORMFACTOR, INC. 发明人 GRUBE, W.;KHANDROS, K.;ELDRIDGE, N.;MATHIEU, L.;LOTFIZADEH, POYA;TSENG, CHIH-CHIANG
分类号 G01R1/073;G01R31/26;G01R31/28;H01L21/66 主分类号 G01R1/073
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