Method Of Forming Thin-Film Electrodes

摘要

A method of forming a fuel cell electrode includes providing a substrate (130) and at least one deposition device (110), developing a deposition characteristic profile having at least one porous layer based on pre-determined desired electrode properties, forming a film in accordance with deposition characteristic profile by sputtering material from the deposition device (110) while varying a relative position of the substrate (130) in relation to the deposition device (110) with respect to at least a first axis.