| 摘要 |
<p>A process solution supplying apparatus for supplying a process solution onto a substrate to be processed, comprising a process solution supply source, a process solution supply tube having its upstream end connected to the process solution supply source and serving to discharge the process solution from the downstream end thereof onto the substrate, a fluid passageway opening-closing valve device mounted on a downstream side of the process solution supply tube for opening-closing the process solution supply tube, and a temperature adjusting solution tube, through which flows a temperature adjusting solution, arranged continuously through the fluid passageway opening-closing valve device in a downstream portion of the process solution supply tube including the fluid passageway opening-closing valve device for adjusting the temperature of the process solution within the process solution supply tube.</p> |
