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发明名称
摘要
申请公布号	JP3805712(B2)	申请公布日期	2006.08.09
申请号	JP20020110329	申请日期	2002.04.12
申请人		发明人
分类号	H01L21/3065;H01L21/306	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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