| 摘要 |
<p>Apparatus for inspecting an article comprising: a controller configured to generate a drive signal having a periodic amplitude variation; a source, the source being operable by the controller to emit a source beam thereby to irradiate an article, the source beam comprising a beam of electromagnetic radiation having a periodic amplitude variation corresponding to that of the drive signal; and a detector, the detector being configured to detect a portion of the source beam that has been transmitted through at least a portion of the article, and to generate a detector signal having an amplitude variation corresponding to the amplitude variation of said portion of the source beam, the controller being further configured to generate a difference value corresponding to a difference between the amplitude of the detector signal and the amplitude of a reference signal.</p> |
