发明名称 |
System and method for measurement and/or analysis of particles in gas stream |
摘要 |
A system and method comprising same for measuring and analyzing particles within a gas feed stream. In one aspect, the system comprises a particle counter and a particle capture filter that are arranged in parallel. In another aspect, the system comprises a purifying device to remove trace molecular impurities from a gas feed stream to reduce the presence of impurities.
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申请公布号 |
EP1688731(A1) |
申请公布日期 |
2006.08.09 |
申请号 |
EP20060002182 |
申请日期 |
2006.02.02 |
申请人 |
AIR PRODUCTS AND CHEMICALS, INC. |
发明人 |
MCDERMOTT, WAYNE, THOMAS;OCKOVIC, RICHARD, CARL;DEAN V. ROTH |
分类号 |
G01N15/06;B01D46/00;B01D53/04;B01D53/22;G01N1/22;G01N1/34;G01N21/53;G01N33/00 |
主分类号 |
G01N15/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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