| 摘要 |
A normally closed microvalve includes a fluid inlet, a fluid outlet, a deflectable closing element, which, in the closed state of the microvalve, is seated on a sealing lip, such that the fluid inlet is fluidically disconnected from the fluid outlet, and in the opened state of the microvalve, is spaced apart from the sealing lip, and a deflectable holding structure which is connected to the closing element such that, between the same, a space exists, which is in fluidic communication to the fluid outlet. An influence of a force onto the holding structure and the closing element in a first direction provides an opening-action to the microvalve, while an influence of a force onto the holding structure and the closing element in a second direction provides a closing-action. The fluid inlet and the closing element are arranged such that a pressure at the fluid inlet exerts a force in the second direction. An effective surface of the holding structure, which, when a pressure is applied to the fluid outlet, causes a force in the second direction, is greater than an effective surface of the closing element, which, when a pressure is applied to the fluid outlet, causes a force in the first direction. |
