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发明名称
MACHINING APPARATUS
摘要
申请公布号
KR20060089655(A)
申请公布日期
2006.08.09
申请号
KR20060010383
申请日期
2006.02.03
申请人
DISCO CORPORATION
发明人
SATO SEISHI
分类号
H01L21/78;B26D1/14
主分类号
H01L21/78
代理机构
代理人
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地址
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