GAS SPRAY APPARATUS FOR THE EQUIPMENT OF MANUFACTURING SEMICONDUCTOR DEVICE,申请号KR20050010100-传众专利搜索

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发明名称	GAS SPRAY APPARATUS FOR THE EQUIPMENT OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号	KR20060089033(A)	申请公布日期	2006.08.08
申请号	KR20050010100	申请日期	2005.02.03
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	KIM, JUNG NAM
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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