发明名称 |
Apparatus for modifying the configuration of an exposed surface of a viscous fluid |
摘要 |
A method and apparatus for achieving a level exposed surface of a viscous material pool for applying viscous material to at least one semiconductor component by contacting at least a portion of the semiconductor component with viscous material within a reservoir. A level viscous material exposed surface is achieved by using at least one mechanism in association with the reservoir. The mechanism is configured to level the exposed surface of viscous material and maintain the exposed surface at a substantially constant level. The reservoir may be shaped such that the exposed surface of viscous material is supplied to a precise location.
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申请公布号 |
US7087116(B2) |
申请公布日期 |
2006.08.08 |
申请号 |
US20030361240 |
申请日期 |
2003.02.10 |
申请人 |
MICRON TECHNOLOGY, INC. |
发明人 |
MODEN WALTER L.;AHMAD SYED S.;CHAPMAN GREGORY M.;JIANG TONGBI |
分类号 |
B05C3/00;H01L21/00;H01L23/495 |
主分类号 |
B05C3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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