发明名称 |
Systems and methods for metrology recipe and model generation |
摘要 |
Systems and methodologies are disclosed for generating setup information for use measuring process parameters associated with semiconductor devices. A system comprises an off-line measurement instrument to measure an unpatterned wafer and a setup information generator to generate setup information according to the unpatterned wafer measurement. The system then provides the setup information to a process measurement system for use in measuring production wafers in a semiconductor manufacturing process.
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申请公布号 |
US7089075(B2) |
申请公布日期 |
2006.08.08 |
申请号 |
US20020132553 |
申请日期 |
2002.04.24 |
申请人 |
TOKYO ELECTRON LIMITED |
发明人 |
HASAN TALAT FATIMA |
分类号 |
G06F19/00;G05B15/02;G05B17/02;G05B23/02 |
主分类号 |
G06F19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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