发明名称 Method and apparatus for tuning a bragg grating in a semiconductor substrate
摘要 A tunable Bragg grating method and apparatus. In one aspect of the present invention, a method according to an embodiment of the present invention includes directing an optical beam into a first end of an optical path having the first end and a second end disposed in a semiconductor substrate, reflecting a first portion of the optical beam having a first center wavelength back out from the first end of the optical path and tuning the optical path to reflect a second portion of the optical beam having a second center wavelength back out from the first end of the optical path. In one embodiment, the Bragg grating is tuned with a heater used to adjust a temperature of the semiconductor substrate. In another embodiment, charge in charge modulated regions along the optical path is modulated to tune the Bragg grating.
申请公布号 US7088877(B2) 申请公布日期 2006.08.08
申请号 US20010881218 申请日期 2001.06.13
申请人 INTEL CORPORATION 发明人 LIU ANSHENG;PANICCIA MARIO J.;NICOLAESCU REMUS
分类号 G02F1/295;G02B6/12;G02B6/124;G02F1/01;G02F1/025 主分类号 G02F1/295
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