| 发明名称 |
PROTECTIVE COVER FOR A LAMP, SET INCLUDING A LAMP AND A PROTECTIVE COVER, METHOD OF INSTALLING A SOURCE IN A LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND DEVICE MANUFACTURED THEREBY |
| 摘要 |
A protective cover (38) for a lamp (2) is flexible and made of a material that has a tensile strength so that the protective cover is impermeable to fragments produced from the lamp when the lamp breaks when covered by the protective cover. The protective cover is used to install the discharge lamp in a source (SO) and removed from the lamp after installing the lamp. |
| 申请公布号 |
KR100609111(B1) |
申请公布日期 |
2006.08.08 |
| 申请号 |
KR20050047490 |
申请日期 |
2005.06.03 |
| 申请人 |
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发明人 |
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| 分类号 |
F21V15/00;B65D85/42;F21V25/12;F21Y101/00;G03F7/20;H01J61/50;H01L21/027 |
主分类号 |
F21V15/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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