TEMPERATURE MEASUREMENT APPARATUS OF SEMICONDUCTOR WAFER MOUNTED IN CHAMBER,申请号KR20050009680-传众专利搜索

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发明名称	TEMPERATURE MEASUREMENT APPARATUS OF SEMICONDUCTOR WAFER MOUNTED IN CHAMBER
摘要
申请公布号	KR20060088731(A)	申请公布日期	2006.08.07
申请号	KR20050009680	申请日期	2005.02.02
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	NA, DONG GEUN
分类号	H01L21/68;H01L21/3065	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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