METHOD OF FORMING A LAYER ON A SUBSTRATE USING A MICROWAVE ENERGY AND APPARATUS FOR PERFORMING THE SAME,申请号KR20050009179-传众专利搜索

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发明名称	METHOD OF FORMING A LAYER ON A SUBSTRATE USING A MICROWAVE ENERGY AND APPARATUS FOR PERFORMING THE SAME
摘要
申请公布号	KR20060088326(A)	申请公布日期	2006.08.04
申请号	KR20050009179	申请日期	2005.02.01
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	HWANG, WAN GOO;CHAE, SEUNG KI;KIM, MYEONG JIN;JANG, KYOUNG HO
分类号	H01L21/205	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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