| 摘要 |
PROBLEM TO BE SOLVED: To enhance homogeneity of a temperature distribution of a mirror surface heated by heat conduction from a resistance heating element. SOLUTION: A method of manufacturing a heater mirror comprises: a preparation step for preparing a substrate 11 with a reflecting film formed thereon; an electrode formation step for forming, on the back surface of the substrate 11, a tongue piece part 10' including a pair of conductors each having a part projecting to the outside of the substrate, and a set of a first electrode 13a and a second electrode 13b being at least a pair of positive and negative electrodes respectively connected to the pair of conductors; and a heating element formation step for forming at least one resistance heating element 14 composed by electrically connecting the one-side and the other-side of the first electrode 13a and the second electrode 13b thereto. COPYRIGHT: (C)2006,JPO&NCIPI |
