| 摘要 |
PROBLEM TO BE SOLVED: To provide a circuit pattern inspection device and its method, capable of detecting an open/short circuit of a conductive pattern by a single sensor unit. SOLUTION: When inspecting the quality of the conductive pattern 2 arranged in a row shape on a glass substrate 3 in a noncontact state, a power supply part 12 for supplying an inspection signal and a sensor 13 for detecting its signal, are arranged in close vicinity to each other. Such a constitution can surely detect an open state, since a remarkable difference is generated in a detecting level of an inspection electric current by its sensor 13, when there is the sensor 13 on the normal conductive pattern without an open state, and when the sensor 13 is positioned on the conductive pattern having an open place. COPYRIGHT: (C)2006,JPO&NCIPI
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