| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a device for forming stereoscopic pattern and a method for forming stereoscopic pattern, capable of forming a fine component having a stereoscopic shape such as microlens, without using a special photomask. <P>SOLUTION: The device for forming stereoscopic pattern is provided with a placing means for placing an object to be worked, a light-generating means of generating a light beam for forming a stereoscopic pattern to a resist applied on the object to be worked placed on the placing means, a fine optical modulation element which is disposed on an optical path of the light beam and produces light diffraction, a control means for controlling the voltage applied on the fine optical modulation element and a scanning means for scanning the light beam on the object to be worked on which the resist is applied. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
