| 摘要 |
PROBLEM TO BE SOLVED: To provide an illumination optical device which illuminates an optional area at an optional position so as to project an image at the illuminated part with sufficient brightness and high resolution. SOLUTION: The illumination optical device for radiating a light beam emitted from a light source to an object to be illuminated has a plurality of optical devices, a plurality of stages for holding the optical devices and moving, and an object holding part for holding the object to be illuminated. COPYRIGHT: (C)2006,JPO&NCIPI
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