| 摘要 |
A micro-oscillator is provided. In an example, the micro-oscillator applied to a signal filter and the like, ground capacitance thereof is reduced to control the loss of signal output. An oscillator element having a beam facing lower electrodes and to be electrostatically driven is formed on a substrate, and a wire width W 1 of a DC bias feeder wire connected to the beam is formed to be narrower than a width of the beam.
|
