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发明名称
SUBSTRATE PROCESSING APPARATUS
摘要
申请公布号
KR20060088003(A)
申请公布日期
2006.08.03
申请号
KR20050112389
申请日期
2005.11.23
申请人
DAI NIPPON SCREEN MFG. CO., LTD.
发明人
NAKANE SHINGO;HANDA MASAYUKI
分类号
H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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