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经营范围
发明名称
DEPOSITION SOURCE AND DEPOSITION APPARATUS USING THE SAME
摘要
申请公布号
KR20060087918(A)
申请公布日期
2006.08.03
申请号
KR20050008794
申请日期
2005.01.31
申请人
SAMSUNG SDI CO., LTD.
发明人
KIM, DO GEUN;KANG, HEE CHEOL;JUNG, MIN JAE;HUH, MYUNG SOO
分类号
H05B33/10;C23C14/26
主分类号
H05B33/10
代理机构
代理人
主权项
地址
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