LIQUID DROPLET EJECTION APPARATUS, WORK EXCITATION METHOD IN LIQUID DROPLET EJECTION APPARATUS, PRODUCTION METHOD FOR ELECTRO-OPTICAL APPARATUS, ELECTRO-OPTICAL APPARATUS AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a liquid droplet ejection apparatus capable of certainly performing wetting/spreading of a liquid on a work by reducing surface-tension of appearance of the liquid without imparting vibration to a drawing stage by vibrating the work at a step after the functional liquid is drawn on the work, a work excitation method in the liquid droplet ejection apparatus, a production method for an electro-optical apparatus, an electro-optical apparatus and an electronic equipment.

SOLUTION: The liquid droplet ejection apparatus 10 for ejecting the liquid from a nozzle 21 of a head 11 to the work W has a work retaining table 14 for retaining the work W; a conveying means 470 for conveying the work WP delivered with the liquid from the work retaining table; and an excitation means 450 provided on the conveying means and exciting the work on the conveying means.

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